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Graphene and Other 2D Materials: An Equipment Manufacturer's Point of View

Date: 2017-03-20
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Graphene and Other 2D Materials:  An Equipment Manufacturer's Point of View

I. Details of the lecture 

Topic: Graphene and Other 2D Materials:  An Equipment Manufacturer's Point of View

Time: 10:30 a.m., March 27, 2017

Location: Lecture Hall ,F2, FIT, Tsinghua University

Speaker: Alex Yoon   Senior Technical Director Lam Research Corp.

II. Content of lecture 

Our electronics are constantly evolving. They semiconductor devices that drive them demand higher performance, lower processing temperatures, less power consumption and uniform film coverage. The discovery of single-layer Graphene as one way to meet these challenges kicked off an extensive wave of research in 2D materials.

Graphene and Transition Metal Dichalcogenides are the most actively investigated 2D materials, but graphene as a channel material still remains difficult to implement. No intrinsic band gap, high processing temperatures, high contact resistance and the lack of reliable wafer-scale doping techniques are all limitations. These limitations have pushed researchers to start looking at graphene for back end of line applications.

Other 2D materials also show promise as alternatives to graphene, based on having intrinsic band gaps. But, these materials have similar implementation challenges such as high processing temperatures and high contact resistance. Mechanical exfoliation and chemical methods to grow 2D materials produce flakes that are not compatible with current high volume manufacturing integrated circuit processes.

Newer, more innovative methods are emerging to meet these processing and manufacturing challenges. Semiconductor equipment manufacturers are actively pursuing solutions and, in this presentation, we will outline the challenges that still remain and share progress on key areas of 2D materials research that are showing the most promise for the future.


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